@article{1bed2136c0354e2b8bd88927bf352a2c,
title = "Energy and exergy analyses of atomic layer deposition of Al2O3 nano-film process",
keywords = "AlO nano-film, ALD, Atomic layer deposition, Degree of perfection, Energy analysis, Energy consumption, Energy efficiency, Energy flow, Energy utilisation efficiency, Exergy, Exergy efficiency, Exergy flow, First law of thermodynamics, Second law of thermodynamics",
author = "Tao Li and Fenfen Wang and Zhang, \{Hong Chao\} and Chris Yuan",
note = "Publisher Copyright: Copyright {\textcopyright} 2014 Inderscience Enterprises Ltd.",
year = "2014",
doi = "10.1504/IJEX.2014.065107",
language = "English",
volume = "15",
pages = "62--75",
journal = "International Journal of Exergy",
issn = "1742-8297",
number = "1",
}