The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique

Rodney G. Handy; Mark J. Jackson; Grant M. Robinson; Michael D. Lafreniere

The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique

Rodney G. Handy
, Mark J. Jackson
, Grant M. Robinson
, Michael D. Lafreniere

Department of Environmental and Occupational Health and Safety Sciences

Purdue University
Ohio University Chillicothe Campus

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Surface Engineering - Proceedings of the 4th International Surface Engineering Conference
Pages	298-301
Number of pages	4
State	Published - 2006
Event	4th International Surface engineering Conference - St. Paul, MN, United States Duration: Aug 1 2005 → Aug 3 2005

Publication series

Name	Surface Engineering - Proceedings of the 4th International Surface Engineering Conference
Volume	2005

Conference

Conference	4th International Surface engineering Conference
Country/Territory	United States
City	St. Paul, MN
Period	8/1/05 → 8/3/05

ASJC Scopus Subject Areas

General Engineering

Cite this

Handy, R. G., Jackson, M. J., Robinson, G. M., & Lafreniere, M. D. (2006). The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique. In Surface Engineering - Proceedings of the 4th International Surface Engineering Conference (pp. 298-301). (Surface Engineering - Proceedings of the 4th International Surface Engineering Conference; Vol. 2005).

The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique. / Handy, Rodney G.; Jackson, Mark J.; Robinson, Grant M. et al.
Surface Engineering - Proceedings of the 4th International Surface Engineering Conference. 2006. p. 298-301 (Surface Engineering - Proceedings of the 4th International Surface Engineering Conference; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Handy, RG, Jackson, MJ, Robinson, GM & Lafreniere, MD 2006, The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique. in Surface Engineering - Proceedings of the 4th International Surface Engineering Conference. Surface Engineering - Proceedings of the 4th International Surface Engineering Conference, vol. 2005, pp. 298-301, 4th International Surface engineering Conference, St. Paul, MN, United States, 8/1/05.

Handy RG, Jackson MJ, Robinson GM, Lafreniere MD. The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique. In Surface Engineering - Proceedings of the 4th International Surface Engineering Conference. 2006. p. 298-301. (Surface Engineering - Proceedings of the 4th International Surface Engineering Conference).

Handy, Rodney G. ; Jackson, Mark J. ; Robinson, Grant M. et al. / The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique. Surface Engineering - Proceedings of the 4th International Surface Engineering Conference. 2006. pp. 298-301 (Surface Engineering - Proceedings of the 4th International Surface Engineering Conference).

@inproceedings{4972c233116d46beaea8b43e28a797ef,

title = "The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique",

author = "Handy, \{Rodney G.\} and Jackson, \{Mark J.\} and Robinson, \{Grant M.\} and Lafreniere, \{Michael D.\}",

year = "2006",

language = "English",

isbn = "0871708353",

series = "Surface Engineering - Proceedings of the 4th International Surface Engineering Conference",

pages = "298--301",

booktitle = "Surface Engineering - Proceedings of the 4th International Surface Engineering Conference",

note = "4th International Surface engineering Conference ; Conference date: 01-08-2005 Through 03-08-2005",

}

TY - GEN

T1 - The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique

AU - Handy, Rodney G.

AU - Jackson, Mark J.

AU - Robinson, Grant M.

AU - Lafreniere, Michael D.

PY - 2006

Y1 - 2006

UR - https://www.scopus.com/pages/publications/33645970709

UR - https://www.scopus.com/pages/publications/33645970709#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:33645970709

SN - 0871708353

SN - 9780871708359

T3 - Surface Engineering - Proceedings of the 4th International Surface Engineering Conference

SP - 298

EP - 301

BT - Surface Engineering - Proceedings of the 4th International Surface Engineering Conference

T2 - 4th International Surface engineering Conference

Y2 - 1 August 2005 through 3 August 2005

ER -

The measurement of ultrafine particles created during a surface micromachining process using a portable particle counting technique

Publication series

Conference

ASJC Scopus Subject Areas

Other files and links

Cite this